Probe Station Accessories

Thermal Chuck

Thermal Chuck

A thermal chuck offers precise temperature control for semiconductor testing with a flat.
DETAIL

- Chuckstage that can control temperature of heating and cooling

- 50mm , 4 inches to 12 inches in size

- The product is lined up in the temperature range of -55℃ to +350℃

- We propose a combination of heaters, chillers, and pellets according to the specifications

- The measurement from microcurrent and high voltage, large current measurement is carried outmeasurement

- Low noise due to use of DC power supply