JAPAN APOLLOWAVE 8-INCH MANUAL PROBE STATION ALPHA200CS (CHAMBER TYPE)

- Low leakage chamber
- ( 200 x 200 mm ) X-Y chuck stage Quick moving
- Platen up/down fine movement 10 mm
- Platen up/down quickly movement (0, 0.3, 5 mm)
- Temperature characteristic evaluation from -60 °C to +350 °C
- Has a compact shield to prevent dew condensation
- The compact shield provides a low noise environment
- With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible
- Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer